Stylus Profilometer

Initially developed for the semiconductor industry to measure photoresist.
A stylus profilometer now has a wide range of applications.
A diamond tip stylus is lowered onto the substrate with a certain low force.
The sample stage is moved and the stylus tip deflection is measured with an LVDT.
Step Height, Roughness, Waviness & Thin Film Stress can be measured.

Bruker Dektak XT
Standard Operating Procedure (SOP)

2D & 3D scanning
Vision64 Data Analysis software
Step Height Range: 50A to 1mm
Scan Length 250mm
Stylus Force: 0.1mg to 12mg
Styli available: 2um & 12um radius